Fluorine grease for high vacuum

FLOIL TKU series

Fluorine grease for semiconductor manufacturing equipment

FLOIL TKU series is an environmentally friendly fluorine grease. This high-spec grease is ideal for various sealing parts such as semiconductor manufacturing equipment, vacuum equipment, vacuum pumps, bearing sliding parts, oil seals, etc., due to its extremely low evaporation rate and viscosity change under high vacuum environment or temperature variance.

‟FLOIL TKU series”Characteristic

Better performance compared to conventional fluorine grease

・REACH Annex XVII Compatible
・Low vapor pressure and extremely low oil evaporation even under high vacuum
・Excellent oxidation stability and chemical resistance
・Does not adversely affect rubber and plastic
・Supports two types of packaging, 1kg container and 50g tube

Product matrix by applications

  1. Issues
  2. Product number
  3. Applications
For use in low temperature environment of -40 ℃ or lower
Product number : TKU-056
Applications : Various sliding parts in semiconductor manufacturing equipment
To suppress the evaporation of oil when used in a high vacuum environment.
Product number : TKU-002
Applications : Various sliding parts in semiconductor manufacturing equipment

We will listen to your needs and conditions of use and propose the most suitable product.


For enquiries regarding our products, purchases, and SDS, kindly contact us at the following.